JPH031428U - - Google Patents
Info
- Publication number
- JPH031428U JPH031428U JP5923489U JP5923489U JPH031428U JP H031428 U JPH031428 U JP H031428U JP 5923489 U JP5923489 U JP 5923489U JP 5923489 U JP5923489 U JP 5923489U JP H031428 U JPH031428 U JP H031428U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- treatment apparatus
- vertical semiconductor
- semiconductor heat
- combustion gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000000567 combustion gas Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 238000002485 combustion reaction Methods 0.000 claims description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5923489U JPH031428U (en]) | 1989-05-23 | 1989-05-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5923489U JPH031428U (en]) | 1989-05-23 | 1989-05-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH031428U true JPH031428U (en]) | 1991-01-09 |
Family
ID=31585551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5923489U Pending JPH031428U (en]) | 1989-05-23 | 1989-05-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH031428U (en]) |
-
1989
- 1989-05-23 JP JP5923489U patent/JPH031428U/ja active Pending
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